Compound buried layer SOI high voltage device with a step buried oxide
Wang, Yuan-Gang, Luo, Xiao-Rong, Ge, Rui, Wu, Li-Juan, Chen, Xi, Yao, Guo-Liang, Lei, Tian-Fei, Wang, Qi, Fan, Jie, Hu, Xia-RongVolume:
20
Langue:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/20/7/077304
Date:
July, 2011
Fichier:
PDF, 1.82 MB
english, 2011