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Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies
Chen, Kuo-Shen, Lin, I-Kuan, Ko, Fu-HsangVolume:
15
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/10/015
Date:
October, 2005
Fichier:
PDF, 1.05 MB
english, 2005