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[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A complete analytical model for square diaphragm capacitive sensor with clamped edge
Deeba, Farah, Mohammed, Shahed Khan, Islam, Md. ShofiqulAnnée:
2013
Langue:
english
DOI:
10.1109/NEMS.2013.6559956
Fichier:
PDF, 247 KB
english, 2013