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[IEEE 2010 IEEE International Interconnect Technology Conference - IITC - Burlingame, CA, USA (2010.06.6-2010.06.9)] 2010 IEEE International Interconnect Technology Conference - Cu to Cu interconnect using 3D-TSV and wafer to wafer thermocompression bonding
Huyghebaert, Cedric, Van Olmen, Jan, Civale, Yann, Phommahaxay, Alain, Jourdain, Anne, Sood, Sumant, Farrens, Shari, Soussan, PhilippeAnnée:
2010
Langue:
english
DOI:
10.1109/IITC.2010.5510444
Fichier:
PDF, 236 KB
english, 2010