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Experimental analysis of the thermal annealing of hard a-C:H films
Peter, S., Günther, M., Gordan, O., Berg, S., Zahn, D.R.T., Seyller, T.Volume:
45
Langue:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2014.03.005
Date:
May, 2014
Fichier:
PDF, 1.09 MB
english, 2014