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High quality Ge surface passivation layer formed by thermal oxidation of Y/Ge structure
Wu, Min-Lin, Wu, Yung-Hsien, Lyu, Rong-Jhe, Chao, Chun-Yen, Wu, Chao-Yi, Lin, Chia-Chun, Chen, Lun-LunVolume:
109
Langue:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.075
Date:
September, 2013
Fichier:
PDF, 1.22 MB
english, 2013