Multi field modeling of a microelectromechanical speaker system with electrostatic driving principle
Tumpold, David, Kaltenbacher, Manfred, Glacer, Christoph, Nawaz, Mohsin, Dehé, AlfonsVolume:
20
Langue:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2102-2
Date:
April, 2014
Fichier:
PDF, 1.34 MB
english, 2014