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Reactive unbalanced magnetron sputtering of the nitrides of Ti, Zr, Hf, Cr, Mo, Ti-Al, Ti-Zr and Ti-Al-V
William D. Sproul, Michael E. Graham, Ming-Show Wong, Paul J. RudnikVolume:
61
Année:
1993
Langue:
english
Pages:
5
DOI:
10.1016/0257-8972(93)90216-b
Fichier:
PDF, 612 KB
english, 1993