Protective behaviour against high temperature oxidation of silicon nitride films synthesized by ion-beam-assisted deposition
Chen Yuanru, Liu Shikai, Liu Xianghuai, Zou Shichang, Shang Zhenkui, Xu Chuntong, Zheng YanVolume:
51
Année:
1992
Langue:
english
Pages:
5
DOI:
10.1016/0257-8972(92)90243-4
Fichier:
PDF, 788 KB
english, 1992