Some considerations of the thermodynamics and kinetics of the chemical vapour deposition of tungsten
Michael L. Hitchman, Andrew D. Jobson, Loek F.Tz. KwakmanVolume:
38
Année:
1989
Langue:
english
Pages:
26
DOI:
10.1016/0169-4332(89)90552-7
Fichier:
PDF, 1.25 MB
english, 1989