Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
1995 Vol. 359; Iss. 1-2

The investigation of the contrast of X-ray masks repaired by laser-induced CVD
E.F Reznikova, V.V Chesnokov, G.I Zharkova, I.K Igumenov, O.A Makarov, V.P Naz'movVolume:
359
Année:
1995
Langue:
english
Pages:
4
DOI:
10.1016/0168-9002(94)01386-1
Fichier:
PDF, 426 KB
english, 1995