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Optimisation of furnace oxidation of Si with respect to negative bias stress instability
V. Nayar, R. Jackson, M.L. Filleul, K.M. Brunson, M.J. Uren, A.M. HodgeVolume:
22
Année:
1993
Langue:
english
Pages:
4
DOI:
10.1016/0167-9317(93)90128-r
Fichier:
PDF, 336 KB
english, 1993