Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano, Akihiko Teshigahara, Yukihiro Takeuchi, Nobuaki KawaharaVolume:
21
Année:
2009
Langue:
english
Pages:
4
DOI:
10.1002/adma.200802611
Fichier:
PDF, 234 KB
english, 2009