Initiated and Oxidative Chemical Vapor Deposition of Polymeric Thin Films: iCVD and oCVD
Wyatt E. Tenhaeff, Karen K. GleasonVolume:
18
Année:
2008
Langue:
english
Pages:
14
DOI:
10.1002/adfm.200701479
Fichier:
PDF, 464 KB
english, 2008