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Micro-Nanostructured Interfaces Fabricated by the Use of Inorganic Block Copolymer Micellar Monolayers as Negative Resist for Electron-Beam Lithography
R. Glass, M. Arnold, J. Blümmel, A. Küller, M. Möller, J.P. SpatzVolume:
13
Année:
2003
Langue:
english
Pages:
7
DOI:
10.1002/adfm.200304331
Fichier:
PDF, 446 KB
english, 2003