
Ultra low-resistance palladium silicide Ohmic contacts to lightly doped n-InGaAs
Yearsley, J. D., Lin, J. C., Hwang, E., Datta, S., Mohney, S. E.Volume:
112
Année:
2012
Langue:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4748178
Fichier:
PDF, 1.47 MB
english, 2012