A series of high capacity turbomolecular pumps with pumping speed up to 40 m3 s−1
GL Saksagansky, DV Serebrennikov, OL Grigoriev, MV Kiselyov, NA Odintsov, BV OrlovVolume:
46
Année:
1995
Langue:
english
Pages:
3
DOI:
10.1016/0042-207x(95)00057-7
Fichier:
PDF, 356 KB
english, 1995