Formation of zirconia—ceria layers on silicon wafers using laser ablation
A.G. Akimov, D.B. Bogomolov, A.E. Gorodetskii, L.P. Kazanskii, A.N. Khodan, I.L. Krylov, J.-P. Langeron, N.A. Melnikova, D. Michel, J.-L. Vignes, J. PerrièreVolume:
238
Année:
1994
Langue:
english
Pages:
6
DOI:
10.1016/0040-6090(94)90641-6
Fichier:
PDF, 655 KB
english, 1994