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Influence of the formation conditions on the microstructure of porous silicon layers studied by spectroscopic ellipsometry
U. Rossow, U. Frotscher, M. Thönissen, M.G. Berger, S. Frohnhoff, H. Münder, W. RichterVolume:
255
Année:
1995
Langue:
english
Pages:
4
DOI:
10.1016/0040-6090(94)05676-5
Fichier:
PDF, 367 KB
english, 1995