Fluorohydrogenated amorphous carbon (a-C:H, F) films prepared by the r.f. plasma decomposition of 1,3-butadiene and carbon tetrafluoride
Jayshree Seth, S.V. BabuVolume:
230
Année:
1993
Langue:
english
Pages:
5
DOI:
10.1016/0040-6090(93)90497-d
Fichier:
PDF, 660 KB
english, 1993