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A new and high precision achromatic ellipsometer: a two-channel and polarization rotator method
J. Monin, H. Sahsah, O. Brevet-PhilibertVolume:
234
Année:
1993
Langue:
english
Pages:
4
DOI:
10.1016/0040-6090(93)90296-2
Fichier:
PDF, 323 KB
english, 1993