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Kinetics and crystallization studies by in situ X-ray diffraction of the oxidation of chemically vapour deposited SiC
F. Sibieude, J. Rodríguez, M.T. Clavaguera-MoraVolume:
204
Année:
1991
Langue:
english
Pages:
11
DOI:
10.1016/0040-6090(91)90507-t
Fichier:
PDF, 714 KB
english, 1991