
Deposition and properties of germanium-carbon alloy films produced from tetraethylgermanium in an r.f. discharge
M. Gazicki, K. Pirker, R. Schallauer, W. Fallmann, F. Olcaytug, G. Urban, A. Jachimowicz, F. KohlVolume:
187
Année:
1990
Langue:
english
Pages:
13
DOI:
10.1016/0040-6090(90)90109-q
Fichier:
PDF, 616 KB
english, 1990