A Monte Carlo study of the silicon film growth from molecular beams
L.N. Aleksandrov, A.N. Kogan, N.P. TikhonovaVolume:
183
Année:
1989
Langue:
english
Pages:
6
DOI:
10.1016/0040-6090(89)90460-4
Fichier:
PDF, 296 KB
english, 1989