Recrystallization of silicon-on-insulator layers in pulsed nanosecond heating (model calculations)
L.N. Aleksandrov, V.Yu. Balandin, A.V. Dvurechenskii, O.A. KulyasovaVolume:
171
Année:
1989
Langue:
english
Pages:
8
DOI:
10.1016/0040-6090(89)90046-1
Fichier:
PDF, 442 KB
english, 1989