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Nitrides of titanium, niobium, tantalum and molybdenum grown as thin films by the atomic layer epitaxy method
L. Hiltunen, M. Leskelä, M. Mäkelä, L. Niinistö, E. Nykänen, P. SoininenVolume:
166
Année:
1988
Langue:
english
Pages:
6
DOI:
10.1016/0040-6090(88)90375-6
Fichier:
PDF, 288 KB
english, 1988