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Efficient model for predictive MEMS microphone design: Model derivation and experimental verification
Oberndörfer, J., Schrag, G., Wachutka, G.Volume:
47
Année:
2012
Langue:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2012.09.400
Fichier:
PDF, 297 KB
english, 2012