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Liftoff-technique of single-crystal diamond plates: study of the lattice damage of the implanted substrates and the crystalline quality of the homoepitaxial films by ion channelling
Samlenski, R., Gärtner, H., Locher, R., Koidl, P., Brenn, R.Volume:
6
Langue:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/S0925-9635(96)00700-5
Date:
January, 1997
Fichier:
PDF, 1.12 MB
english, 1997