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The microhardness, electrical conductivity and temperature coefficient of resistance of reactively sputtered TiCxOyNz films
H. Fark, J. Chevallier, K. Reichelt, H. Dimigen, H. HübschVolume:
100
Année:
1983
Langue:
english
Pages:
9
DOI:
10.1016/0040-6090(83)90276-6
Fichier:
PDF, 369 KB
english, 1983