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Influence of substrate bias on the composition, structure and electrical properties of reactively d.c.-sputtered TiN films
J.M. Poitevin, G. Lemperiere, J. TardyVolume:
97
Année:
1982
Langue:
english
Pages:
9
DOI:
10.1016/0040-6090(82)90418-7
Fichier:
PDF, 733 KB
english, 1982