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Effects of fluorine implantation into a-C:H thin films
Wong, S.P., Peng, Shaoqi, Ke, Ning, Li, PengxuVolume:
2
Langue:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/0925-9635(93)90125-L
Date:
March, 1993
Fichier:
PDF, 339 KB
english, 1993