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Synthesis and structure characterization of low dielectric constant MSQ films by using octamethyl cyclotetrasiloxane (D4) as a porosity promotion agent
Yin, Guiqin, Yuan, Qianghua, Ning, ZhaoyuanVolume:
96
Langue:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2013.03.007
Date:
October, 2013
Fichier:
PDF, 610 KB
english, 2013