Metal-Organic Framework ZIF-8 Films As Low-κ Dielectrics in Microelectronics
Eslava, Salvador, Zhang, Liping, Esconjauregui, Santiago, Yang, Junwei, Vanstreels, Kris, Baklanov, Mikhail R., Saiz, EduardoVolume:
25
Langue:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm302610z
Date:
January, 2013
Fichier:
PDF, 3.99 MB
english, 2013