[IEEE 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum - Geneva, Switzerland (2007.05.29-2007.06.1)] 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum - Post-CMOS Compatible Aluminum Nitride MEMS Filters and Resonant Sensors
Olsson, Roy H., Fleming, James G., Wojciechowski, Kenneth E., Baker, Michael S., Tuck, Melanie R.Année:
2007
Langue:
english
DOI:
10.1109/FREQ.2007.4319108
Fichier:
PDF, 1.79 MB
english, 2007