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Remote hydrogen microwave plasma chemical vapor deposition from methylsilane precursors. 1. Growth mechanism and chemical structure of deposited a-SiC:H films
Wrobel, A.M., Walkiewicz-Pietrzykowska, A., Uznanski, P.Volume:
564
Langue:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.04.087
Date:
August, 2014
Fichier:
PDF, 700 KB
english, 2014