CrNx films prepared using feedback-controlled high power impulse magnetron sputter deposition
Wu, Wan-Yu, Hsiao, Bo-Hung, Chen, Pin-Hung, Chen, Wei-Chih, Ho, Chun-Ta, Chang, Chi-LungVolume:
32
Langue:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4862147
Date:
March, 2014
Fichier:
PDF, 2.44 MB
english, 2014