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The Effects of Hydrogen Annealing on Gate Oxide Integrity of U-Shaped Trench MOSFET with 400 Å Gate Oxide
Wu, Chun-Tai, Sharp, Joelle, Madson, Gordon, Michalowicz, JerzyVolume:
153
Année:
2006
Langue:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2223415
Fichier:
PDF, 890 KB
english, 2006