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[IEEE 2011 International Conference on Microelectronic Test Structures (ICMTS) - Amsterdam, Netherlands (2011.04.4-2011.04.7)] 2011 IEEE ICMTS International Conference on Microelectronic Test Structures - A simple system for on-die measurement of atto-Farad capacitance
Baruch, Ezra, Shperber, Shai, Levy, Rinatya, Weizman, Yoav, Fridburg, Jacob, Marks, RachelAnnée:
2011
Langue:
english
DOI:
10.1109/ICMTS.2011.5976854
Fichier:
PDF, 142 KB
english, 2011