Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 03 Vol. 32; Iss. 2
Impedance characterization of nanogap interdigitated electrode arrays fabricated by tilted angle evaporation for electrochemical biosensor applications
Jeon, Dae-Young, Jeong Park, So, Kim, Yongha, Shin, Min-Ju, Soo Kang, Pil, Kim, Gyu-TaeVolume:
32
Langue:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4863512
Date:
March, 2014
Fichier:
PDF, 2.25 MB
english, 2014