Large area deposition of 〈100〉-textured diamond films by a 60-kW microwave plasma CVD reactor
Ando, Yutaka, Yokota, Yoshihiro, Tachibana, Takeshi, Watanabe, Akihiko, Nishibayashi, Yoshiki, Kobashi, Koji, Hirao, Takashi, Oura, KenjiroVolume:
11
Langue:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/s0925-9635(02)00018-3
Date:
March, 2002
Fichier:
PDF, 969 KB
english, 2002