Effective Processes for Arc-Plasma Treatment in Large Vacuum Chambers of Technological Facilities
Borisov, Dmitry P., Koval, Nikolay N., Korotaev, Alexander D., Kuznetsov, Vladimir M., Romanov, Vasily Yakovlevich, Terekhov, Pavel A., Chulkov, Evgeny V.Volume:
41
Langue:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2013.2247777
Date:
August, 2013
Fichier:
PDF, 3.10 MB
english, 2013
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