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Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric
Kozen, Alexander C., Schroeder, Marshall A., Osborn, Kevin D., Lobb, C. J., Rubloff, Gary W.Volume:
102
Année:
2013
Langue:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4801979
Fichier:
PDF, 1.07 MB
english, 2013