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Silicon fusion bonding and its characterization
Harendt, C, Graf, H G, Hofflinger, B, Penteker, EVolume:
2
Langue:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/2/3/001
Date:
September, 1992
Fichier:
PDF, 294 KB
english, 1992