Simulations and experiments on excimer laser micromachining of metal and polymer
Akhtar, Syed Nadeem, Choudhary, Hirendra, Anantha Ramakrishna, S., Ramkumar, JanakarajanVolume:
13
Langue:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.13.1.013008
Date:
February, 2014
Fichier:
PDF, 1.97 MB
english, 2014