Investigation of diffraction-based measurement errors in optical testing of aspheric optics with digital micromirror devices
Stuerwald, Stephan, Schmitt, RobertVolume:
13
Langue:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.13.1.011113
Date:
February, 2014
Fichier:
PDF, 5.28 MB
english, 2014