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Design and fabrication of a resonant pressure sensor by combination of DETF quartz resonator and silicon diaphragm
Cheng, Rongjun, Zhao, Yulong, Li, Cun, Tian, Bian, Yu, Zhongliang, Liu, KeyinVolume:
21
Langue:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-014-2108-9
Date:
March, 2015
Fichier:
PDF, 952 KB
english, 2015