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SPIE Proceedings [SPIE SPIE Optical Metrology 2013 - Munich, Germany (Monday 13 May 2013)] Optical Measurement Systems for Industrial Inspection VIII - The road towards accurate optical width measurements at the industrial level
Bodermann, Bernd, Lehmann, Peter H., Osten, Wolfgang, Köning, Rainer, Bergmann, Detlef, Albertazzi, Armando, Buhr, Egbert, Hässler-Grohne, Wolfgang, Flügge, Jens, Bosse, HaraldVolume:
8788
Année:
2013
Langue:
english
DOI:
10.1117/12.2021888
Fichier:
PDF, 716 KB
english, 2013