SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Microelectronic Device and Multilevel Interconnection Technology - Development and production integration of a planarized AlCu interconnect process for submicron CMOS
Brown, Kevin C., Hill, Rodney, Reddy, Krishna, Gadepally, Kamesh, Chen, Ih-Chin, Dixit, Girish A., Doan, Trung T., Sasaki, NobuoVolume:
2636
Année:
1995
Langue:
english
DOI:
10.1117/12.221137
Fichier:
PDF, 778 KB
english, 1995