The effect of water on the mechanical properties of native oxide coated silicon structure in MEMS
Zhang, Yun-An, Tao, Jun-Yong, Wang, Yan-Lei, Ren, Zhi-Qian, Liu, Bin, Chen, XunVolume:
53
Langue:
english
Journal:
Microelectronics Reliability
DOI:
10.1016/j.microrel.2013.07.018
Date:
September, 2013
Fichier:
PDF, 3.65 MB
english, 2013