SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Micromachining and Microfabrication Process Technology X - Silicon-glass anodic bonding at low temperature
Malecki, Krzysztof M., Della Corte, Francesco G., Maher, Mary-Ann, Stewart, Harold D.Volume:
5715
Année:
2005
Langue:
english
DOI:
10.1117/12.590753
Fichier:
PDF, 1016 KB
english, 2005